Tetrakis(Trimethylsilyl) Orthosilicate

Catalog Number	ACM3555473-1
CAS Number	3555-47-3
Structure
Synonyms	Tetrakis(Trimethylsilyloxy)Silane
Molecular Weight	384.84 g/mol
Molecular Formula	C12H36O4Si5
Boiling Point	220 °C
Flash Point	76 °C
Purity	0.95
Appearance	Colorless to almost colorless clear liquid
Application	Tetrakis(Trimethylsilyl) Orthosilicate is an organosilicon compound utilized as a precursor in the production of nanostructured organosilicon polymer films through plasma-enhanced chemical vapor deposition (PECVD) conducted at atmospheric pressure This compound serves an essential role in synthesizing low dielectric constant SiCOH films by the PECVD method often in combination with cyclohexane thereby contributing to advancements in electronic materials by reducing dielectric constants
EC Number	222-613-4
MDL Number	MFCD00051587
Packaging	100 g
Reaxys Registry Number	1793898
Specific Gravity	0.87

Custom Reviews

October 10, 2024

Highly Effective Precursor for Polymer Films

Tetrakis(Trimethylsilyl) Orthosilicate from Alfa Chemistry was crucial in our PECVD process, yielding high-quality organosilicon films. Its role in synthesizing SiCOH films enhanced our research efficiency significantly. Reliable and easy to use.

※ Please kindly noted that this product is for research use only.