Tetrakis(Trimethylsiloxy)Silane

Catalog Number	ACM3555473
CAS Number	3555-47-3
Structure
Synonyms	Tetrakis-trimethylsilyloxy-silan; Tetrakis(trimethylsiloxy)silane; 1,1,1,5,5,5-hexamethyl-3,3-bis-trimethylsilanyloxy-trisiloxane; Tetrakis-trimethylsiloxy-silan; 3.3-Bis-trimethylsiloxy-hexamethyltrisiloxan; Orthokieselsaeure-tetrakis-trimethylsilylester; 1,1,1,5,5,5-Hexamethyl-3,3-bis-trimethylsilyloxy-trisiloxan;
IUPAC Name	tetrakis(trimethylsilyl)silicate
Molecular Weight	384.84 g/mol
Molecular Formula	C12H36O4Si5
Canonical SMILES	C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C
InChI Key	VNRWTCZXQWOWIG-UHFFFAOYSA-N
Boiling Point	284.4 °C(760 mmHg)
Melting Point	-60 °C
Flash Point	117.4 °C
Purity	0.98
Density	0.893 g/mL
Appearance	Transparent liquid
Application	Tetrakis(Trimethylsiloxy)Silane is an organosilicon compound primarily used as a precursor in the synthesis of nanostructured organosilicon polymer films through plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure Additionally it serves a crucial role in the production of low dielectric constant SiCOH films when used in combination with cyclohexane utilizing the PECVD method
Storage	Ambient temperatures.
EC Number	222-613-4
Exact Mass	384.14600
Packaging	10 g; 100 g;